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Patent Information


Title
プラズマ処理装置 
Author
AKITOSHI OKINO.  
Kind
Patent 
Status
Published 
Applicant
国立大学法人東京科学大学, アネスト岩田株式会社.  
Filing Date
2025/07/15
Application Number
PCT/JP2025/025293
Unexamined Application Date
2026/02/05
Publication Number
WO 2026/028806

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