Science Tokyo Research Repository (T2R2)

Patent Information

Title

プラズマ処理装置

Author

AKITOSHI OKINO, Taiki Osawa, Natsuki Sakurada.

Kind

Patent

Status

Published

Applicant

国立大学法人東京科学大学.

Filing Date

2025/08/01

Application Number

特願2025-129329

Unexamined Application Date

2026/03/13

Publication Number

特開2026-047169

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