Fine-Focusing System of Intense Beams for Application of Ion-Induced Plasma

Publication Information

Title

Japanese:
English:	Fine-Focusing System of Intense Beams for Application of Ion-Induced Plasma

Author

Japanese:	笹公和, 小栗慶之, 岡村昌宏, 岡田雅之, 伊藤崇, 林﨑規託, 服部俊幸.
English:	Kimikazu Sasa, Yoshiyuki Oguri, Masahiro Okamura, Masashi Okada, Takashi Ito, Noriyosu Hayashizaki, Toshiyuki Hattori.

Language

English

Journal/Book name

Japanese:
English:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Volume, Number, Page

Vol. 113 pp. 67-70

Published date

June 1996

Publisher

Japanese:
English:	Elsevier

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI