Effects of Fluence and Temperature on Sputtering Yield by He-Ion Bombardment(共著)

Publication Information

Title

Japanese:
English:	Effects of Fluence and Temperature on Sputtering Yield by He-Ion Bombardment(共著)

Author

Japanese:	M. Tomita, K. Masumori, M. Takami, H. Akatsuka, T. Nate, S. Miyagi, M. Sakisaka.
English:	M. Tomita, K. Masumori, M. Takami, H. Akatsuka, T. Nate, S. Miyagi, M. Sakisaka.

Language

English

Journal/Book name

Japanese:
English:	IPPJ-AM

Volume, Number, Page

Vol. 64 pp. 68

Published date

1989

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: