Dependence of Gas Temperature of Oxygen and Nitrogen Mixed Plasma on their Mixture Ratio

Publication Information

Title

Japanese:	酸素窒素混合プラズマのガス温度の混合比に対する依存性
English:	Dependence of Gas Temperature of Oxygen and Nitrogen Mixed Plasma on their Mixture Ratio

Author

Japanese:	北村直久, 坂本武士, 松浦治明, 赤塚洋.
English:	N. Kitamura, T. Sakamoto, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:	プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会プロシーディングス
English:	Proceeding of Plasma Science Symposium 2005/ The 22nd Symposium on Plasma Processing (PSS-2005/SPP-22)

Volume, Number, Page

pp. 549

Published date

2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:	プラズマ科学シンポジウム2005/第22回プラズマプロセシング研究会

Conference site

Japanese:
English:	名古屋