Experimental study of capillary Z-pinch discharge plasma for EUV lithography

Publication Information

Title

Japanese:
English:	Experimental study of capillary Z-pinch discharge plasma for EUV lithography

Author

Japanese:	Masato Watanabe, Inho Song, Yasushi Hayashi, Akitoshi Okino, Koich Yasuoka, Kazuhiko Horioka, Eiki Hotta.
English:	Masato Watanabe, Inho Song, Yasushi Hayashi, Akitoshi Okino, Koich Yasuoka, Kazuhiko Horioka, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	Europhysics Conference Abstracts(CD-ROM)

Volume, Number, Page

Vol. 25G pp. P5.007

Published date

2004

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: