Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:	HfNのECR Ar/O₂プラズマ酸化により形成したHfO_xN_y薄膜の熱処理に関する検討
English:

Author

Japanese:	黒瀬朋紀, 内川偉史, 大見俊一郎, 酒井徹志.
English:	黒瀬朋紀, 内川偉史, 大見俊一郎, 酒井徹志.

Language

Japanese

Journal/Book name

Japanese:	第52回応用物理学関係連合講演会講演予稿集
English:

Volume, Number, Page

Vol. 2 pp. 899

Published date

2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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