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Title
Japanese:ECRスパッタ法による3次元ゲート構造上への高誘電率絶縁膜の形成 
English: 
Author
Japanese: 森俊介, 中港努, 大見俊一郎, 酒井徹志.  
English: 森俊介, 中港努, 大見俊一郎, 酒井徹志.  
Language Japanese 
Journal/Book name
Japanese:第52回応用物理学関係連合講演会講演予稿集 
English: 
Volume, Number, Page Vol. 2        pp. 980
Published date Mar. 2005 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese:埼玉大学 
English: 

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