Effect of Admixture of Rare Gases on Microwave-Excited Oxygen Plasma

Publication Information

Title

Japanese:
English:	Effect of Admixture of Rare Gases on Microwave-Excited Oxygen Plasma

Author

Japanese:	T. Sakamoto, K. Naoi, H. Matsuura, H. Akatsuka.
English:	T. Sakamoto, K. Naoi, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	27th International Conference Phenomena in Ionised Gases, CD-ROM Proceedings

Volume, Number, Page

pp. 03-211

Published date

2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:	27th International Conference Phenomena in Ionised Gases

Conference site

Japanese:
English:	Eindhoven, the Netherlands