Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography

Publication Information

Title

Japanese:
English:	Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography

Author

Japanese:	宋仁皓, Smruti Mohanty, 渡邊正人, 河村徹, 沖野晃俊, 堀岡一彦, 堀田栄喜.
English:	INHO SONG, Smruti Mohanty, MASATO WATANABE, Tohru Kawamura, AKITOSHI OKINO, KAZUHIKO HORIOKA, HOTTA Eiki.

Language

English

Journal/Book name

Japanese:
English:	J.Plasma Fusion Res.

Volume, Number, Page

Vol. 81 No. 9 pp. 647-648

Published date

Sept. 1, 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: