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Title
Japanese:超微細加工プロセス用完全非接触XY運動テーブルシステムの開発 
English: 
Author
Japanese: 谷口浩一, 吉岡勇人, 橋詰等, 新野秀憲.  
English: 谷口浩一, 吉岡勇人, 橋詰等, 新野秀憲.  
Language Japanese 
Journal/Book name
Japanese:2005年度精密工学会秋季大会　講演論文集 
English: 
Volume, Number, Page         pp. 43-44
Published date Sept. 2005 
Publisher
Japanese: 
English: 
Conference name
Japanese:2005年度精密工学会秋季大会 
English: 
Conference site
Japanese: 
English: 

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