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Title
Japanese:低温プラズマ発生装置用2MHz，2kW電圧形インバータ―三次共振回路を用いたスイッチングの高速化― 
English: 
Author
Japanese: 藤田　英明, 赤木　泰文.  
English: 藤田　英明, 赤木　泰文.  
Language Japanese 
Journal/Book name
Japanese:電気学会論文誌 D 
English: 
Volume, Number, Page Vol. 117    No. 10    pp. 1262-1268
Published date Oct. 1997 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
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Conference site
Japanese: 
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