Ti Surface Oxidization by Microwave Discxharge Oxygen Plasma and Plasma Parameters

Publication Information

Title

Japanese:
English:	Ti Surface Oxidization by Microwave Discxharge Oxygen Plasma and Plasma Parameters

Author

Japanese:	S. Kakizaka, T. Sakamoto, H. Matsuura, H. Akatsuka.
English:	S. Kakizaka, T. Sakamoto, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	Bull. Am. Phys. Soc.

Volume, Number, Page

Vol. 50 No. 7 pp. 21

Published date

Oct. 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:	58th GEC05 (Gaseous Electronics Conference 2005)

Conference site

Japanese:
English:	San Jose, California