Micromachined Display Device Using Sheet Waveguide and Multicantilevers Driven by Electrostatic Force

Publication Information

Title

Japanese:
English:	Micromachined Display Device Using Sheet Waveguide and Multicantilevers Driven by Electrostatic Force

Author

Japanese:	T.Oguchi, M.Hayase, T.Hatsuzawa.
English:	T.Oguchi, M.Hayase, T.Hatsuzawa.

Language

English

Journal/Book name

Japanese:
English:	IEEE Trans. on Industrial Electronics

Volume, Number, Page

Vol. 52 No. 4 pp. 984-991

Published date

Apr. 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI