Tungsten Buried Growth by Using Thin Flow-Liner for Small Collector Capacitance in InP HBT

Publication Information

Title

Japanese:
English:	Tungsten Buried Growth by Using Thin Flow-Liner for Small Collector Capacitance in InP HBT

Author

Japanese:	Y. Miyamoto, M. Ishida, T. Nonaka, T. Yamamoto, K. Furuya.
English:	Y. Miyamoto, M. Ishida, T. Nonaka, T. Yamamoto, K. Furuya.

Language

English

Journal/Book name

Japanese:
English:	International Conference on Indium Phosphide and Related

Volume, Number, Page

pp. TuA-1-4

Published date

May 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conference on Indium Phosphide and Related

Conference site

Japanese:
English:	Glasgow

DOI