Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by Different dI/dt Discharge Current Pulses

Publication Information

Title

Japanese:
English:	Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by Different dI/dt Discharge Current Pulses

Author

Japanese:	宋仁皓, Kazuhiro IWATA, Yusuke HOMMA, Smruti Mohanty, 渡邊正人, 河村徹, 沖野晃俊, 安岡康一, 堀岡一彦, 堀田栄喜.
English:	INHO SONG, Kazuhiro IWATA, Yusuke HOMMA, Smruti Mohanty, MASATO WATANABE, Tohru Kawamura, AKITOSHI OKINO, KOICHI YASUOKA, KAZUHIKO HORIOKA, Eiki HOTTA.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 44 No. 12 pp. 8640-8645

Published date

Dec. 1, 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI