High quality EUV emission from discharge produced plasma source

Publication Information

Title

Japanese:
English:	High quality EUV emission from discharge produced plasma source

Author

Japanese:	Masato Watanabe, Inho Song, Toshiro Sakamoto, Yasunori Kobayashi, A.Okino, Smruti R. Mohanty, Kazuhiko Horioka, E.Hotta.
English:	Masato Watanabe, Inho Song, Toshiro Sakamoto, Yasunori Kobayashi, A.Okino, Smruti R. Mohanty, Kazuhiko Horioka, E.Hotta.

Language

English

Journal/Book name

Japanese:
English:	The 32nd IEEE Int. Conf. on Plasma Science

Volume, Number, Page

pp. 146

Published date

June 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	USA