Development of Capillary Z-pinch Discharge Light Source for EUV Lithography

Publication Information

Title

Japanese:
English:	Development of Capillary Z-pinch Discharge Light Source for EUV Lithography

Author

Japanese:	Y.Kobayashi, K.Iwata, Y.Homma, I.Song, M.Masnavi, K.Yasuoka, M.Watanabe, A.Okino, K.Horioka, E.Hotta.
English:	Y.Kobayashi, K.Iwata, Y.Homma, I.Song, M.Masnavi, K.Yasuoka, M.Watanabe, A.Okino, K.Horioka, E.Hotta.

Language

English

Journal/Book name

Japanese:
English:	Proc. of Plasma Science Symposium 2005 and The 22nd Symposium on Plasma Processing

Volume, Number, Page

pp. 437-438

Published date

2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	日本