Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography

Publication Information

Title

Japanese:
English:	Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography

Author

Japanese:	SONG Inho, MOHANTY R. Smruti, WATANABE Masato, KAWAMURA Toru, OKINO Akitoshi, HORIOKA Kazuhiko, HOTTA Eiki.
English:	SONG Inho, MOHANTY R. Smruti, WATANABE Masato, KAWAMURA Toru, OKINO Akitoshi, HORIOKA Kazuhiko, HOTTA Eiki.

Language

English

Journal/Book name

Japanese:
English:	J. Plasma Fusion Research

Volume, Number, Page

Vol. 81 No. 9 pp. 647-648

Published date

2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: