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Publication Information
Title
Japanese:
English:
Development of a Gas Jet-Type Z-Pinch EUV Light Source for Next-Generation Lithography
Author
Japanese:
SONG Inho, MOHANTY R. Smruti,
WATANABE Masato
, KAWAMURA Toru, OKINO Akitoshi, HORIOKA Kazuhiko, HOTTA Eiki.
English:
SONG Inho, MOHANTY R. Smruti,
WATANABE Masato
, KAWAMURA Toru, OKINO Akitoshi, HORIOKA Kazuhiko, HOTTA Eiki.
Language
English
Journal/Book name
Japanese:
English:
J. Plasma Fusion Research
Volume, Number, Page
Vol. 81 No. 9 pp. 647-648
Published date
2005
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
©2007
Tokyo Institute of Technology All rights reserved.