Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithgraphy Source Driven by Different dI/dt Discharge Current Pulses

Publication Information

Title

Japanese:
English:	Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithgraphy Source Driven by Different dI/dt Discharge Current Pulses

Author

Japanese:	Inho SONG, Kazuhiko IWATA, Yusuke HOMMA, Smruti Ranjan MOHANTY, Masato WATANABE, Toru KAWAMURA, Akitoshi Okino, Koichi YASUOKA, Kazuhiko HORIOKA, Eiki HOTTA.
English:	Inho SONG, Kazuhiko IWATA, Yusuke HOMMA, Smruti Ranjan MOHANTY, Masato WATANABE, Toru KAWAMURA, Akitoshi Okino, Koichi YASUOKA, Kazuhiko HORIOKA, Eiki HOTTA.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 44 No. 12 pp. 8640-8645

Published date

2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: