Deposition of High Density Amorphous Carbon Films by Sputtering in Electron-Beam-Excited Plasma

Publication Information

Title

Japanese:
English:	Deposition of High Density Amorphous Carbon Films by Sputtering in Electron-Beam-Excited Plasma

Author

Japanese:	Mutsumi Iwasaki, 平田敦.
English:	Mutsumi Iwasaki, Atsushi HIRATA.

Language

English

Journal/Book name

Japanese:
English:	New Diamond and Frontier Carbon Technology

Volume, Number, Page

Vol. 15 No. 3 pp. 139-149

Published date

Mar. 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: