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Title
Japanese:極薄HfO2薄膜のECR Ar/N2プラズマ窒化条件の検討 
English: 
Author
Japanese: 佐藤雅樹, 黒瀬朋紀, 大見俊一郎.  
English: 佐藤雅樹, 黒瀬朋紀, 大見俊一郎.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page Vol. 2        pp. 674
Published date Sept. 2005 
Publisher
Japanese: 
English: 
Conference name
Japanese:第66回応用物理学会学術講演会講演予稿集 
English: 
Conference site
Japanese:徳島大学 
English: 

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