Electrical properties of vacuum annealed La<sub>2</sub>O<sub>3</sub> thin films grown by E-beam evaporation

Publication Information

Title

Japanese:
English:	Electrical properties of vacuum annealed La₂O₃ thin films grown by E-beam evaporation

Author

Japanese:	Y. Kim, K. Miyauchi, S. Ohmi, K. Tsutsui, H. Iwai.
English:	Y. Kim, K. Miyauchi, S. Ohmi, K. Tsutsui, H. Iwai.

Language

English

Journal/Book name

Japanese:
English:	Microelectronics Journal

Volume, Number, Page

Vol. 36 pp. 41-49

Published date

2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI