Effect of Ultra-thin Ti Layer on PtSi Work Function Modulation

Publication Information

Title

Japanese:
English:	Effect of Ultra-thin Ti Layer on PtSi Work Function Modulation

Author

Japanese:	S. Ohmi, Y. Kato, H. Fujiura, Y. Sawakuma, N. Ohkuma.
English:	S. Ohmi, Y. Kato, H. Fujiura, Y. Sawakuma, N. Ohkuma.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 426-429

Published date

Sept. 2005

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2005 IEEE International Symposium on Semiconductor Manufacturing, Conference Proceedings

Conference site

Japanese:
English:	San Jose, USA