Numerical Study on the Gas Temperature of Microwave Discharge Plasma as a Rarefied Gas Dynamic System

Publication Information

Title

Japanese:
English:	Numerical Study on the Gas Temperature of Microwave Discharge Plasma as a Rarefied Gas Dynamic System

Author

Japanese:	T. Ichiki, T. Sakamoto, H. Matsuura, H. Akatsuka.
English:	T. Ichiki, T. Sakamoto, H. Matsuura, H. Akatsuka.

Language

English

Journal/Book name

Japanese:
English:	6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing

Volume, Number, Page

pp. 251-252

Published date

Jan. 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	6th International Conference on Reactive Plasmas and 23rd Symposium on Plasma Processing (ICRP6/SPP23)

Conference site

Japanese:
English:	Matsushima, Miyagi, Japan