A comparative study on the performance of a xenon capillary Z-pinch EUV lithography light source using a pinhole camera

Publication Information

Title

Japanese:
English:	A comparative study on the performance of a xenon capillary Z-pinch EUV lithography light source using a pinhole camera

Author

Japanese:	宋仁皓, Kazuhiro Iwata, Yusuke Homma, Smruti Mohanty, 渡邊正人, 河村徹, 沖野晃俊, 安岡康一, 堀岡一彦, 堀田栄喜.
English:	INHO SONG, Kazuhiro Iwata, Yusuke Homma, Smruti Mohanty, MASATO WATANABE, Tohru Kawamura, AKITOSHI OKINO, KOICHI YASUOKA, KAZUHIKO HORIOKA, Eiki Hotta.

Language

English

Journal/Book name

Japanese:
English:	Plasma Sources Science and Technology

Volume, Number, Page

Vol. 15 pp. 322-327

Published date

Apr. 1, 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI