超音波振動を用いた非接触ナノ位置決めテーブルシステム

Publication Information

Title

Japanese:	超音波振動を用いた非接触ナノ位置決めテーブルシステム
English:	Nano Positioning Table System of Noncontact Type Using Ultrasonic Vibration

Author

Japanese:	吉岡勇人, 新野秀憲.
English:	Hayato YOSHIOKA, Hidenori SHINNO.

Language

Japanese

Journal/Book name

Japanese:	超音波TECHNO
English:	Ultrasonic Technology

Volume, Number, Page

Vol. 18 No. 3 pp. 48-51

Published date

May 2006

Publisher

Japanese:
English:

Conference name

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Conference site

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English: