Estimation of Numerical Aperture Effect on the Basis of Measured Pupil Function of Mirau-type Objective

Publication Information

Title

Japanese:
English:	Estimation of Numerical Aperture Effect on the Basis of Measured Pupil Function of Mirau-type Objective

Author

Japanese:	T.Doi, T.Kurosawa, T.Hatsuzawa.
English:	T.Doi, T.Kurosawa, T.Hatsuzawa.

Language

English

Journal/Book name

Japanese:
English:	Optical Society of America

Volume, Number, Page

pp. OFMC4

Published date

Oct. 2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:	OSA Annual Meeting

Conference site

Japanese:
English:	Rochester, USA