イオンビーム照射によるダイヤモンド膜の平滑化

Publication Information

Title

Japanese:	イオンビーム照射によるダイヤモンド膜の平滑化
English:	Smoothing of Diamond Films by Ion Beam Irradiation

Author

Japanese:	平田　敦, 戸倉　和, 吉川昌範.
English:	平田　敦, 戸倉　和, 吉川昌範.

Language

Japanese

Journal/Book name

Japanese:	精密工学会誌
English:	Journal of the Japan Society for Precision Engineering

Volume, Number, Page

Vol. 58 No. 2 pp. 289-295

Published date

1992

Publisher

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English:

Conference name

Japanese:
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Conference site

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