1陰極-3陽極アーク放電プラズマによる大面積ダイヤモンド膜合成装置の試作

Publication Information

Title

Japanese:	1陰極-3陽極アーク放電プラズマによる大面積ダイヤモンド膜合成装置の試作
English:	Development of 1 cathode-3 anode Arc Discharge Plasma Apparatus for Enlargement of Diamond Deposition Area

Author

Japanese:	平田　敦, 吉川昌範.
English:	平田　敦, 吉川昌範.

Language

Japanese

Journal/Book name

Japanese:	精密工学会誌
English:	Journal of the Japan Society for Precision Engineering

Volume, Number, Page

Vol. 59 No. 5 pp. 838-843

Published date

1993

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Conference name

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Conference site

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