生成ダイヤモンド膜に及ぼすアーク放電プラズマジェットCVD装置の電極位置の影響

Publication Information

Title

Japanese:	生成ダイヤモンド膜に及ぼすアーク放電プラズマジェットCVD装置の電極位置の影響
English:	Effects of Electrodes Arrangement of Arc Discharge Plasma Jet CVD Apparatus on Diamond Films

Author

Japanese:	平田　敦, 内田孝宏, 吉川昌範.
English:	平田　敦, 内田孝宏, 吉川昌範.

Language

Japanese

Journal/Book name

Japanese:	精密工学会誌
English:	Journal of the Japan Society for Precision Engineering

Volume, Number, Page

Vol. 60 No. 4 pp. 591-595

Published date

1994

Publisher

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English:

Conference name

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Conference site

Japanese:
English: