ArFエキシマレーザ照射によるCVDダイヤモンドの加工

Publication Information

Title

Japanese:	ArFエキシマレーザ照射によるCVDダイヤモンドの加工
English:	Processing of CVD Diamond by ArF Excimer Laser Irradiation

Author

Japanese:	鈴木浩明, 平田　敦, 戸倉　和, 吉川昌範.
English:	鈴木浩明, 平田　敦, 戸倉　和, 吉川昌範.

Language

Japanese

Journal/Book name

Japanese:	精密工学会誌
English:	Journal of the Japan Society for Precision Engineering

Volume, Number, Page

Vol. 61 No. 3 pp. 406-410

Published date

1995

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: