ペニングイオン源を用いたプラズマCVD装置の試作

Publication Information

Title

Japanese:	ペニングイオン源を用いたプラズマCVD装置の試作
English:	Development of a Plasma CVD Apparatus Using Penning Ion Source

Author

Japanese:	平田　敦, 多々見俊宏, 柳瀬文典, 吉川昌範.
English:	平田　敦, 多々見俊宏, 柳瀬文典, 吉川昌範.

Language

Japanese

Journal/Book name

Japanese:	精密工学会誌
English:	Journal of the Japan Society for Precision Engineering

Volume, Number, Page

Vol. 61 No. 5 pp. 687-691

Published date

1995

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Conference name

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Conference site

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