超伝導マグネット援用ホローカソード型プラズマCVD装置の試作

Publication Information

Title

Japanese:	超伝導マグネット援用ホローカソード型プラズマCVD装置の試作
English:	Development of a Superconducting Magnet Assisted Hollow Cathode Plasma CVD Apparatus

Author

Japanese:	新留隆志, 岡本　理, 平田　敦, 吉川昌範.
English:	新留隆志, 岡本　理, 平田　敦, 吉川昌範.

Language

Japanese

Journal/Book name

Japanese:	精密工学会誌
English:	Journal of the Japan Society for Precision Engineering

Volume, Number, Page

Vol. 62 No. 12 pp. 1757-1761

Published date

1996

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Conference name

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Conference site

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