Precise Measurements of Micro-linewidth by using a Micro-Interferometer and a Scanning Electron Microscope

Publication Information

Title

Japanese:	集積型マイクロ干渉計と走査型電子顕微鏡を用いた微小線幅の精密測定
English:	Precise Measurements of Micro-linewidth by using a Micro-Interferometer and a Scanning Electron Microscope

Author

Japanese:	初澤毅, 豊田幸司, 谷村吉久, 奈良誠, 豊永修司, 原信也, 岩崎裕隆, 近藤一彦.
English:	初澤毅, 豊田幸司, 谷村吉久, 奈良誠, 豊永修司, 原信也, 岩崎裕隆, 近藤一彦.

Language

English

Journal/Book name

Japanese:	精密工学会誌
English:	Jour. of Japan Soc, of Prec, Engineering

Volume, Number, Page

Vol. 60 No. 11 pp. 1582-1585

Published date

1994

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: