A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEMs.

Publication Information

Title

Japanese:
English:	A compact laser interferometer with a piezodriven scanner for metrological measurements in regular SEMs.

Author

Japanese:	初澤毅, 谷村吉久, 豊田幸司, 奈良誠, 豊永修司, 原信也, 岩崎裕隆, 近藤一彦.
English:	初澤毅, 谷村吉久, 豊田幸司, 奈良誠, 豊永修司, 原信也, 岩崎裕隆, 近藤一彦.

Language

English

Journal/Book name

Japanese:
English:	Review of Scientific Instruments

Volume, Number, Page

Vol. 65 No. 8 pp. 2510-2513

Published date

1994

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: