Oxide-Nitride-Oxide/Si(III) Interface Analyzed by Optical Second Harmonic Generation

Publication Information

Title

Japanese:
English:	Oxide-Nitride-Oxide/Si(III) Interface Analyzed by Optical Second Harmonic Generation

Author

Japanese:	平山博之.
English:	HIROYUKI HIRAYAMA.

Language

English

Journal/Book name

Japanese:
English:	Procedings of the 26th IEEE Semiconductor Interface Specialists Conference

Volume, Number, Page

pp. 3-5

Published date

1995

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: