Structure of Inductively Coupled Plasma with Metal Vapor Ionization

Publication Information

Title

Japanese:
English:	Structure of Inductively Coupled Plasma with Metal Vapor Ionization

Author

Japanese:	T.Murakami, 奥野喜裕, S.Kabashima.
English:	T.Murakami, Y.Okuno, S.Kabashima.

Language

English

Journal/Book name

Japanese:
English:	IEEE Trans. Plasma Science

Volume, Number, Page

Vol. 25 No. 4 pp. 769-775

Published date

Aug. 1997

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: