Etching of Aluminum Film by Hydrogen Atoms | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Etching of Aluminum Film by Hydrogen Atoms

Author

Japanese:	原亨和.
English:	MICHIKAZU HARA.

Language

English

Journal/Book name

Japanese:
English:	Applied Physics Letters

Volume, Number, Page

Vol. 59 pp. 1793

Published date

1991

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

©2007 Tokyo Institute of Technology All rights reserved.