Growth of silicon oxide on silicon in the thin film region in an oxygen plasma | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Growth of silicon oxide on silicon in the thin film region in an oxygen plasma

Author

Japanese:	中村一隆.
English:	KAZUTAKA NAKAMURA.

Language

English

Journal/Book name

Japanese:
English:	Solid State Commun.

Volume, Number, Page

Vol. 83 pp. 385

Published date

1992

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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