Multiphoton ionization detection of SiO molecule formed by O2 oxidation of a silicon surface | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Multiphoton ionization detection of SiO molecule formed by O2 oxidation of a silicon surface

Author

Japanese:	中村一隆.
English:	KAZUTAKA NAKAMURA.

Language

English

Journal/Book name

Japanese:
English:	J. Appl. Phys.

Volume, Number, Page

Vol. 75 pp. 4261

Published date

1994

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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