Oxygen ion effect on plasma oxidation of silicon | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Oxygen ion effect on plasma oxidation of silicon

Author

Japanese:	中村一隆.
English:	KAZUTAKA NAKAMURA.

Language

English

Journal/Book name

Japanese:
English:	J. Surf. Sci. Soc. Jpn.

Volume, Number, Page

Vol. 16 pp. 504

Published date

1995

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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