A Microwave Discharge Oxygen Plasma of Atmospheric Pressure -- Apparatus, Diagnostics, Numerical Modeling, and Application --

Publication Information

Title

Japanese:
English:	A Microwave Discharge Oxygen Plasma of Atmospheric Pressure -- Apparatus, Diagnostics, Numerical Modeling, and Application --

Author

Japanese:	H. Akatsuka, M. Komatsubara, T. Tandai, T. Terashi, K. Kano, M. Umebayashi, R. Ohkawara, S. Nemoto, A.N. Ezoubtchenko, M.
English:	H. Akatsuka, M. Komatsubara, T. Tandai, T. Terashi, K. Kano, M. Umebayashi, R. Ohkawara, S. Nemoto, A.N. Ezoubtchenko, M.

Language

English

Journal/Book name

Japanese:
English:	XXIV ICPIG, Warsaw

Volume, Number, Page

Vol. 24 pp. 121

Published date

1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: