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Title
Japanese:微細はりの振動特性評価によるシリコン酸化膜のヤング率推定 
English: 
Author
Japanese: 初澤毅, 岡村康雄.  
English: 初澤毅, 岡村康雄.  
Language Japanese 
Journal/Book name
Japanese:計測自動制御学会論文集 
English:Trans.of the Society of Instrumunt and Control Engineers 
Volume, Number, Page Vol. 34    No. 6    pp. 479-482
Published date 1998 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.9746/sicetr1965.34.479

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