シリコン単結晶の異方性エッチングを用いた表面粗さ基準片

Publication Information

Title

Japanese:	シリコン単結晶の異方性エッチングを用いた表面粗さ基準片
English:

Author

Japanese:	初澤毅, 井上尚紀, 早瀬仁則, 坂野憲幾.
English:	初澤毅, 井上尚紀, 早瀬仁則, 坂野憲幾.

Language

Japanese

Journal/Book name

Japanese:	計測自動制御学会論文集
English:	Trans.of the Society of Instrumunt and Control Engineers

Volume, Number, Page

Vol. 34 No. 10 pp. 1345-1348

Published date

1998

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI