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Publication Information
Title
Japanese:
基板加振式プラズマエッチングの研究(第1報) 基本装置の試作と加振効果の検証
English:
Author
Japanese:
初澤毅
, 渡辺直哉, 早瀬仁則.
English:
初澤毅
, 渡辺直哉, 早瀬仁則.
Language
Japanese
Journal/Book name
Japanese:
精密工学会誌
English:
Jour. of Japan Soc, of Prec, Engineering
Volume, Number, Page
Vol. 65 No. 9 pp. 1335-1339
Published date
1999
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Conference site
Japanese:
English:
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Tokyo Institute of Technology All rights reserved.