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Title
Japanese:基板加振式プラズマエッチングの研究(第1報) 基本装置の試作と加振効果の検証 
English: 
Author
Japanese: 初澤毅, 渡辺直哉, 早瀬仁則.  
English: 初澤毅, 渡辺直哉, 早瀬仁則.  
Language Japanese 
Journal/Book name
Japanese:精密工学会誌 
English:Jour. of Japan Soc, of Prec, Engineering 
Volume, Number, Page Vol. 65    No. 9    pp. 1335-1339
Published date 1999 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
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Conference site
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