Particle Generation and Its Characterstics in Plasma Enhanced Evaporation | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Particle Generation and Its Characterstics in Plasma Enhanced Evaporation

Author

Japanese:	赤塚洋.
English:	HIROSHI AKATSUKA.

Language

English

Journal/Book name

Japanese:
English:	Proc. 13th Symp. Plasma Chem., Beijin

Volume, Number, Page

Vol. 13 pp. 991

Published date

1997

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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