Analysis of GaInAsP surfaces by contact-angle measurement for wafer direct bonding with garnet crystals

Publication Information

Title

Japanese:
English:	Analysis of GaInAsP surfaces by contact-angle measurement for wafer direct bonding with garnet crystals

Author

Japanese:	H.Yokoi, 水本哲弥, M.Shimizu, T.Waniishi, N.Futakuchi, N.Kaida, Y.Nakano.
English:	H.Yokoi, T.Mizumoto, M.Shimizu, T.Waniishi, N.Futakuchi, N.Kaida, Y.Nakano.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 38 No. 8 pp. 4780-4783

Published date

Aug. 1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI