Low temperature wafer direct bonding between GaInAsP etch stop layer and Gd3Ga5O12

Publication Information

Title

Japanese:
English:	Low temperature wafer direct bonding between GaInAsP etch stop layer and Gd3Ga5O12

Author

Japanese:	H.Yokoi, 水本哲弥.
English:	H.Yokoi, T.Mizumoto.

Language

English

Journal/Book name

Japanese:
English:	Conference on Lasers and Electro-Optics Europe (CLEO Europe ’98) Technical Digest

Volume, Number, Page

pp. 336

Published date

Sept. 1998

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	Glasgow