Contact angle measurement of GaInAsP surfaces for wafer direct bonding with garnet crystals

Publication Information

Title

Japanese:
English:	Contact angle measurement of GaInAsP surfaces for wafer direct bonding with garnet crystals

Author

Japanese:	H.Yokoi, 水本哲弥, M.Shimizu, T.Waniishi, N.Futakuchi, N.Kaida, Y.Nakano.
English:	H.Yokoi, T.Mizumoto, M.Shimizu, T.Waniishi, N.Futakuchi, N.Kaida, Y.Nakano.

Language

English

Journal/Book name

Japanese:
English:	The Pacific Rim Conference on Lasers and Electro-Optics (CLEO Pacific Rim ’99) Technical Digest

Volume, Number, Page

Vol. 4 pp. 1206-1207

Published date

Sept. 1999

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: